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Oil Less -5KV Ion Vacuum Pump 55L/S Air 12L/S Ar High Vacuum Degree

Categories Ion Vacuum Pump
Brand Name: KYKY
Model Number: 3L-50
Certification: CE
Place of Origin: China
MOQ: 1
Payment Terms: L/C, T/T
Delivery Time: 4weeks
Packaging Details: Wooden box for overseas shipment
Flange: DN100CF
pumping speed: 55L/s Air
Ultimate pressure: 7E-8 Pa
voltage: -5KV
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    Oil Less -5KV Ion Vacuum Pump 55L/S Air 12L/S Ar High Vacuum Degree

    Ion Pump , 3L-50 , DN100CF , 55L/s Air , 12L/s Ar , -5KV

    Sputter-ion pump is vacuum generation equipment for obtaining clean and ultra-high vacuum.

    The sputter-ion pump is main pump of oil less ultra-high vacuum set.

    The ion pump works in a closed system which doesn't require continuous working backing pump.


    Principle:

    Material of anode is stainless steel barrel, and material of cathode istitanium plate. Penning discharge process ionizes gas under the joint action of magnetic field and electric field, thus realizing exhausting of gas.


    Triode ion pump is improved for increasing the pumping rate for inert gas; ions of inert gas are subjected to grazing incidence into titanium grid of cathode, then neutralized, and reflected to pump wall and anode for being buried with the titanium film. As inert gas buried in the pump wall will not be released due to positive ion bombardment, the pumping speed for inert gas is increased.

    Advantages:

    1. High vacuum degree

    2. Zero vibration

    3. Zero noise

    4. Cleanness

    5. Convenient to operate


    Applications:

    It can be applied to scientific experiment apparatuses such as high-energy particle accelerator, controlled thermonuclear reaction apparatus, electric vacuum device, semiconductor material, electronic microscope and mass spectrometer, and other industrial equipment requiring ultra-high vacuum.


    Specifications:

    Model3L-50
    FlangeDN100CF
    Pumping speed(L/S)( air)55
    Pumping speed(Ar)12
    Start-up pressure (Pa)≤5×10-4
    ultimate pressure (Pa)7×10-8
    (℃)baking temperature <200
    With magnetic
    Without magnetic<300
    working voltage(KV)-5
    electrode unit2
    dimension(mm)90×90(4-M6)
    L*W*H (mm)290×120×299
    (kg) weight22
    Product Tags:

    varian ion pump

      

    starcell ion pump

      
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