Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

Maglev Pump , CXF-200/1401 , Water cooling , On board

series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature.

The advantages:

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

Specifications:

KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world.

KYKY invented the first set of Turbo Molecular Pump, Commercial Helium Leak Detector and Scanning Electron Microscope in China.

KYKY offers vacuum technology solutions, consultation and services to our customers. The main products are applied in the fields of Life Science, Medicine Engineering, Automobile Industry, Aerospace, Energy Industry, Construction Materials, Modern Decoration, High-end Consumer Electronics, etc.

In the spirit of technology innovation and customer orientation. KYKY will continuously contribute to the further development in vacuum industry of China.

KYKY TECHNOLOGY CO., LTD. has many years of experiences in R & D and manufacturing of vacuum generation products, including series molecular pumps, series molecular pump stations, series ion pumps, series gate valves and supporting controllers.

Since developing the first vertical turbo molecular pump in 1970’s, KYKY always orients

to the demand-driven market, aims to meet the requirement of our customers, and continuously launches new products in the enterprise spirit of developing on innovation, Sequentially KYKY launches Oil- lubricated series turbo molecular pumps, grease-lubricated series molecular pumps and CXF-series magnetically levitated

molecular pumps.

KYKY molecular pumps are widely applied to instrument fields of mass spectrometers and surface analyzers, to optical filming, panel display, ion etching, disc manufacturing, solar cells and lighting enterprises, and to academic institutions and R & D institutes. By virtue of excellent cost performance, these products win good reputation from the majority of users. High quality products are derived from our continuous technical breakthrough and pursuit of quality.

KYKY will persistently provide better products and quality services for customers by our continuous innovation, passion and

commitment.