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| Categories | Gas Detector Sensor |
|---|---|
| Brand Name: | KACISE |
| Model Number: | KGD-MQ-536 |
| Certification: | CE |
| Place of Origin: | CHINA |
| MOQ: | 1PCS |
| Payment Terms: | L/C,D/A,D/P,T/T,Western Union,MoneyGram |
| Supply Ability: | 1000 Piece/Pieces per Week negotiable |
| Delivery Time: | 5-8 work days |
| Packaging Details: | each unit has individual box and all boxes are packed in standard packages or customers requests available |
| Detection Principle: | NDIR |
| Detected Gases: | WF6, CF4, SF6, NF3, CO2 |
| Measuring Range: | 1 - 264ppm (0 - 200mTorr) |
| Repeatability: | ±0.5% |
| Linearity: | ±1%F.S. |
| Detection Limit: | 1ppm |
| Company Info. |
| Xi'an Kacise Optronics Co.,Ltd. |
| Verified Supplier |
| View Contact Details |
| Product List |
KGD - MQ - 536 Infrared Gas Sensor
Product Introduction
The KGD - MQ - 536 Infrared Gas Sensor is based on Non - Dispersive Infrared (NDIR) technology. It can accurately measure gases such as WF6, CF4, SF6, NF3, and CO2 generated in semiconductor applications. It is compatible with common pre - set dimensions, flanges, and communication protocols within equipment. It can be used for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, which helps reduce cleaning time, cut costs, and increase production.

Product Features
Technical Parameters
| Parameter | Details |
| Detection Principle | NDIR |
| Detected Gases | WF6, CF4, SF6, NF3, CO2 |
| Measuring Range | 1 - 264ppm (0 - 200mTorr) |
| Repeatability | ±0.5% |
| Linearity | ±1%F.S. |
| Detection Limit | 1ppm |
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