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KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring

Categories Gas Detector Sensor
Brand Name: KACISE
Model Number: KGD-MQ-536
Certification: CE
Place of Origin: CHINA
MOQ: 1PCS
Payment Terms: L/C,D/A,D/P,T/T,Western Union,MoneyGram
Supply Ability: 1000 Piece/Pieces per Week negotiable
Delivery Time: 5-8 work days
Packaging Details: each unit has individual box and all boxes are packed in standard packages or customers requests available
Detection Principle: NDIR
Detected Gases: WF6, CF4, SF6, NF3, CO2
Measuring Range: 1 - 264ppm (0 - 200mTorr)
Repeatability: ±0.5%
Linearity: ±1%F.S.
Detection Limit: 1ppm
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KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring

KGD - MQ - 536 Infrared Gas Sensor

Product Introduction

The KGD - MQ - 536 Infrared Gas Sensor is based on Non - Dispersive Infrared (NDIR) technology. It can accurately measure gases such as WF6, CF4, SF6, NF3, and CO2 generated in semiconductor applications. It is compatible with common pre - set dimensions, flanges, and communication protocols within equipment. It can be used for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, which helps reduce cleaning time, cut costs, and increase production.

Product Features

  • Adopts NDIR technology, supports multi - gas monitoring (including WF6, CF4, SF6, NF3, CO2, etc.).
  • Fast response time and high sensitivity.
  • No consumables.
  • Analog/digital communication.
  • Modular design for easy integration.

Technical Parameters

ParameterDetails
Detection PrincipleNDIR
Detected GasesWF6, CF4, SF6, NF3, CO2
Measuring Range1 - 264ppm (0 - 200mTorr)
Repeatability±0.5%
Linearity±1%F.S.
Detection Limit1ppm
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