| Sign In | Join Free | My benadorassociates.com |
|
| Sign In | Join Free | My benadorassociates.com |
|
| Categories | Fused Quartz Plate |
|---|---|
| Brand Name: | ZMSH |
| Model Number: | 3 Inch Quartz Wafer |
| Certification: | rohs |
| Place of Origin: | CHINA |
| MOQ: | 10 |
| Price: | by case |
| Payment Terms: | T/T |
| Supply Ability: | 1000pcs per month |
| Delivery Time: | 5-8weeks |
| Packaging Details: | Package in 100-grade cleaning room |
| Diameter: | 3 inch (76.2mm) |
| Thickness Tolerance: | ±0.02mm |
| Surface Roughness: | ≤1nm (Polished Grade) |
| Transmittance @193nm: | >92% |
| CTE (RT-300°C): | 0.55×10⁻⁶/°C |
| Applications: | Semiconductor Manufacturing,High-power Lasers |
| Company Info. |
| SHANGHAI FAMOUS TRADE CO.,LTD |
| Verified Supplier |
| View Contact Details |
| Product List |
The 3-inch quartz wafer (76.2mm) is a large-format, high-purity fused silica substrate specifically designed for advanced semiconductor, optoelectronic, and precision optical applications requiring larger processing areas. Compared to 2-inch wafers, the 3-inch specification enhances production efficiency and reduces edge loss, making it particularly suitable for batch-manufactured MEMS devices, advanced photomasks, and laser optical systems.
ZMSH specializes in customized production of large-size quartz wafers, offering:
· Full Size Coverage: From 2-inch to 12-inch wafers, supporting non-standard size customization
· Complex Shape Processing: Round wafers, square plates, and special-shaped cuts (e.g., sector-shaped, D-cut)
· Multi-functional Surface Treatment: Single/double-side polishing, coatings (AR/IR/DLC), micro-structure etching
· Industry Solutions: Semiconductor-grade cleanliness (Class 100), laser drilling, high-precision alignment marks
| Parameter | Specification |
| Diameter | 3 inch (76.2mm) |
| Thickness Tolerance | ±0.02mm |
| Surface Roughness | ≤1nm (Polished Grade) |
| Transmittance @193nm | >92% |
| CTE (RT-300°C) | 0.55×10⁻⁶/°C |
| Parallelism | ≤5μm |
| Vacuum Compatibility | 10⁻⁹ Torr |
- Large-size Homogeneity: TTV≤15μm at 76.2mm diameter ensures process uniformity across large areas
- Deep UV Optimization: >92% transmittance at 193nm, supporting ArF lithography and DUV laser applications
- Thermal Shock Resistance: Thermal expansion coefficient 0.55×10⁻⁶/°C, withstands rapid temperature cycling (1000°C/min)
- Chemical-grade Inertness: Plasma erosion resistant, suitable for dry etching and CMP environments
- Mechanical Reinforcement: Optional chemical strengthening increases flexural strength by 300% to 500MPa
| Field | Specific Applications |
| Semiconductor Manufacturing | Large-format photomask substrates, EUV lithography optics, 3D IC interposers |
| High-power Lasers | Laser resonator mirrors, kW-level fiber laser end caps, ultrafast laser pulse compression grating substrates |
| Quantum Technology | Qubit carrier wafers, cold atom chip vacuum viewports |
| Aerospace | Satellite optical payload windows, radiation-resistant sensor protection covers |
| Biomedical | Microfluidic chip masters, DNA sequencing chip substrates, endoscope light guides |
ZMSH provides quartz prism customization services for UV to IR wavelengths, including right-angle prisms, pentaprisms, and beam splitter prisms, featuring:
· Nanometer-level Surface Accuracy (λ/10@632.8nm)
· Special Coatings (laser damage-resistant coatings, polarizing beam splitter coatings)
· Integrated Processing (prism-wafer hybrid structures, microchannel cooling designs)
Ideal for cutting-edge applications in laser beam shaping, spectral analysis, and high-energy physics experiments.
1. Q: What are the advantages of 3-inch quartz wafers over smaller sizes?
A: 3-inch (76.2mm) quartz wafers provide 44% more usable area than 2-inch wafers, reducing edge loss and increasing throughput for MEMS manufacturing and optical coating processes.
2. Q: How to handle and store 3-inch fused silica wafers properly?
A: Always use cleanroom-grade wafer carriers with edge-contact supports, and store in Class 100 environments with <40% RH to prevent surface contamination and moisture absorption.
Tag: #3 Inch Quartz Substrate, #Customized, #Fused Silica Plates, #SiO₂ Crystal, #Quartz wafers, #JGS1/JGS2 Grade, # High-Purity, #Fused Silica Optical Components, #Quartz Glass Plate, #Custom-Shaped Through-Holes, #3 Inch Quartz Substrate, #76.2mm Diameter
|
Fused Quartz Tubes Optical Glass Tubes SiO2 Tubes Transparent Pipe JGS1 JGS2 Customized
SiO2 Crystal Fused Quartz Plate 2inch 6inch High Hardness Quartz Glass
120 X 120mm Fused Quartz Plate Customized Square Shape For Electronic Light
6Inch Diameter 150mm Quartz Crystal Glass Wafer 5N Purity SiO₂
GS1 Grade Synthetic Fused Quartz Plate , Quartz Optical Window 2.2g/cm³ Density
6inch Heat-Resistant Transparent Monocrystalline Quartz Crystal Substrate For SAW Devices
Optical Fused Silica Quartz Tube SiO2 Crystal Material With Customized Hole Shape
8inch Quartz Wafer Diameter 200mm TTV ≤10μm Ra ≤1.0 Nm For High Precision Sensors
Rectangle Shape Silica Fused Quartz Plate Double Side Polished DSP GS1 GS2 GS3 Grade
Custom 2inch 3inch 4inch 6inch 8inch 12inch Quartz Wafers Transparent Fused Silica Substrates
