Aluminum Oxide Ceramic Robot Arm / Claw / Finger For Semiconductor Wafer

High Quality Ceramic arm/ Ceramic Claw / Ceramic Finger

The robot arm handles and moves the semiconductor wafer between positions. It’s basically the robot’s hand so it is important that it be thermally and dimensionally stable and not contaminate the chamber with particles or chemical contaminants.

Manufacturing Processes:

Main applications:

• Components for semiconductor equipment
• Pates
• Rings
• Gas distribution plates
• Nozzles
• Cover plates
• RF windows
• Domes
• Substrates
• Insulation parts

Key features&Specifications:

• Wide variety of shaping options:
• hot pressing
• CIP
• gelcasting
• dry pressing etc.
• Up to diameter of 650mm
• Very low porosity
• Ultra chemical resistant
• Direct sintered to allow for net shape sintering
• Large size capcibility (up to 4 meter)

Quality Control:

Ceramic Arm/Ceramic Claw/Ceramic Finger:

Founded in 2017, Kegu is a leading advanced materials developer based in China’s Xixian New District, Qinhan New City—strategically positioned near major transport links including the Xianyang East Expressway. With a registered capital of 35.5 million RMB (approx. 5 million USD), we operate from a modern 5-acre production facility where we combine materials science innovation with precision manufacturing.

We specialize in engineering high-performance ceramic components for mission-critical industries such as New Energy, Chemical Processing, Pharmaceuticals, and Aerospace. Our products are known for exceptional thermal stability, excellent chemical resistance, and outstanding mechanical properties.

Leveraging a strong R&D foundation, we deliver customized ceramic solutions that meet stringent international quality standards while enhancing operational performance and reducing lifecycle costs for OEMs and innovators worldwide. At Kegu, we’re solving tomorrow’s material challenges—today.