Considering characteristics of infrared optical coating such as
complicated ingredients, thickness,
long working hours, and high control accuracy, the company has
developed a special equipment
suitable for infrared anti-reflective coating, infrared
spectroscopic coating, infrared filter coating and
other infrared optical film components.
-Ultimate vacuum: 8×10-5 Pa (12 hours)
-Vacuum recovery time: from atmospheric pressure to 4×10-3 Pa≤8min
-Adopting 400 molecular pump + direct-coupled pump + Roots pump
-The vacuum program has two modes: automatic and manual. PLC
interlock control, status on computer display and control via
compute
-Workpiece rotation: frequency converter speed control, 0-30 rpm
-Steam-resistant control: constant current control through
high-power six-position rotary
-Workpiece baking: three-point temperature control, equipped with
digital temperature controller+digital power regulator.
-One E-type electron gun, gun power 10KW; high voltage: 0-10KV
adjustable; beam current: 0-1A adjustable; crucible with automatic
memory of scanned patterns
-XTC/3 type crystal controller + 12-bit crystal control probe from
INFICON of the United States, with process control
-Φ160MM ion source (Beijing), beam energy can be set by computer
-Control system: 15-inch touch screen or industrial computer as the
host computer and PLC as the slave computer to realize automatic
vacuuming, constant temperature baking, automatic
pre-melting control of the evaporation-resistant electron gun,
coating control and film thickness monitoring, automatic control of
the ion source, and baking cooling, automatic pick-up, all
parameter recording, which ensures fully automatic coating control
via a single click
-When the pick-up mode is turned on, an automatic exhaust device of
the vacuum chamber door will be activated to remove the smell in
the clean room,which can effectively protect the safety of the
operators
