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| Categories | Deposition Furnace |
|---|---|
| Packaging Details: | wooden case packing |
| Supply Ability: | 10pcs/month |
| Price: | USD18,000-100,000/SET |
| Brand Name: | Jingtan |
| Certification: | CE |
| MOQ: | 1 set |
| Delivery Time: | 60 days |
| Payment Terms: | L/C/T/T |
| place of origin: | Hunan, China |
| type: | Induction Furnace |
| usage: | deposition furnace |
| video outgoing-inspection: | Provided |
| machinery test report: | Provided |
| core components: | PLC |
| brand name: | Jingtan |
| voltage: | 380 |
| weight (t): | 5 T |
| power (kw): | 220 |
| warranty: | 1 Year |
| key selling points: | Competitive Price |
| Design Temperature (℃): | 1250-2200 |
| Woring temperature: | 900-1200℃ |
| Pressure rise rate (Pa/h): | 0.67Pa/h(150Pa/24h) |
| Heating method: | Resistance/induction |
| Working atmosphere: | vacuum/CH4/C3H6/H2/N2/Ar |
| Furnace type: | Square/roundVertical/Horizontal |
| Furnace cooling mode: | furnace shell water cooling |
| Infrared instrument: | single/double colorimetric |
| Temperature uniformity: | ±5 |
| Limit vacuum Degree(Pa): | 1-100 |
| Condition: | New |
| Warranty of core components: | 1 Year |
| Applicable Industries: | Other, semiconductor |
| Company Info. |
| Hunan Jingtan Automation Equipment Co., LTD. |
| Verified Supplier |
| View Contact Details |
| Product List |
KGPS/IGBT Medium Frequency Heating Graphite Resistance Or Induction Graphite Pyrolysis Furnace
Parameter /Model No. | JT-0305-C | JT-0505-C | JT-0608-C | JT-0608-C | JT-0812-C | JT-1120-C | JT-1218-C | JT-1520-C |
Working Zone Size φ×H(mm) | 300×500 | 500×500 | 600×800 | 600×1200 | 800×1200 | 1100×2000 | 1200×1800 | 1500×2000 |
Highest Temperature (℃) | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 |
Temperature uniformity(℃) | ±5 | ±5 | ±5/±7.5 | ±7.5/±10 | ±7.5/±10 | ±10/±15 | ±10/±15 | ±15/±20 |
Limit Vacuum Degree(Pa) | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 |
Limit Vacuum Degree(Pa) | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 |
Heating method | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction |

Design temperature | 1250℃/1650℃/1800℃/2200℃ |
Common temperature | 900~1200℃ |
Vacuum degree | < 50Pa |
Pressure rise rate | 6.67pA /h(or 150Pa/24h) in cold state of empty furnace |
Heating mode | graphite resistance heating or induction heating, independent
temperature control, good temperature uniformity |
Atmosphere medium | vacuum /CH4/C3H6/H2/N2/Ar |

Gas control mode | mass flow meter control, multi-channel gas path, uniform flow
field, no deposition dead Angle, good deposition effect;Multi-stage
and efficient exhaust treatment system, environmentally friendly,
easy to clean up |
Furnace type | square, round, vertical or horizontal structure (non-standard
design), fully enclosed deposition chamber, good sealing effect, strong anti-pollution ability; |
Furnace cooling mode | furnace shell water cooling, external circulation quick cooling
system can be selected, short cooling time, high production efficiency; |

Structure form | horizontal - side discharge, vertical - up/down discharge |
Locking mode | manual/automatic |
Shell material | inner stainless steel/all stainless steel |
Insulation material | carbon felt/graphite felt/carbon fiber cured felt |
Infrared instrument | single colorimetric/double colorimetric |
Power supply | KGPS/IGBT(only suitable for medium frequency heating) Product parameter: |














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