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| Categories | Ceramic Substrate |
|---|---|
| Brand Name: | ZMSH |
| Model Number: | SiC Vertical Furnace Tube |
| Certification: | rohs |
| Place of Origin: | CHINA |
| MOQ: | 25 |
| Price: | by case |
| Payment Terms: | T/T |
| Delivery Time: | 2-4 weeks |
| Packaging Details: | package in 100-grade cleaning room |
| Maximum service temperature: | >1700°C |
| Thermal conductivity: | ≥120 W/(m·K) |
| Mohs hardness: | 9.5 |
| Coefficient of thermal expansion: | 4.0~5.0×10⁻⁶/K |
| Elastic modulus: | 410 GPa or higher |
| Applications: | Semiconductor Manufacturing, Industrial Kilns and Energy |
| Company Info. |
| SHANGHAI FAMOUS TRADE CO.,LTD |
| Verified Supplier |
| View Contact Details |
| Product List |
High-Purity SiC Vertical Furnace Tube High-Temperature Resistant
A Silicon Carbide (SiC) Vertical Furnace Tube is a high-performance ceramic structural component manufactured using processes such as reaction sintering or chemical vapor deposition (CVD). It is specifically designed for extreme environments in semiconductor manufacturing, metallurgy, and high-temperature industries. By leveraging the core material properties of silicon carbide—high hardness, high stiffness, low thermal expansion, high thermal conductivity, and excellent chemical stability—it maintains exceptional dimensional stability (with a coefficient of thermal expansion as low as 4.0-5.0×10⁻⁶/K) and structural integrity under conditions exceeding 1700°C, in corrosive atmospheres, and during rapid temperature changes. It provides a reliable material solution for high-temperature processes.
| Feature Category | Core Advantage | Key Parameters/Performance |
| High-Temperature Stability | Extremely low thermal expansion, high temperature resistance | Coefficient of thermal expansion 4.0~5.0×10⁻⁶/K (-196°C to 1600°C), maximum service temperature >1700°C |
| Thermal Management | Excellent thermal conductivity, rapid temperature equalization | Thermal conductivity ≥120 W/(m·K) (room temperature), ~45 W/(m·K) (1200°C) |
| Mechanical Strength | High hardness, high stiffness, resistance to deformation | Mohs hardness 9.5, elastic modulus 410 GPa or higher |
| Chemical Inertness | Resistance to acids, alkalis, and plasma erosion | Corrosion rate in strong acid (70% HNO₃) and strong alkali (45% KOH) <0.2 mg/(cm²·h) |
| Service Life & Reliability | Thermal shock resistance, long life, low maintenance | Withstands thermal shock testing from 1200°C to room temperature (quenching) while maintaining structural integrity, and exhibits dimensional deviation <0.1mm after continuous operation for 2 years in industrial scenarios |
Q1: What is the primary application of a silicon carbide (SiC) vertical furnace tube?
A1: It is primarily used as a high-temperature reactor tube in semiconductor diffusion furnaces, CVD systems, and industrial kilns (e.g., for SiC/GaN epitaxial growth, oxidation, or annealing processes at 1500–1700°C), providing exceptional thermal stability and corrosion resistance in extreme environments.
Q2: Why choose silicon carbide over traditional materials for vertical furnace tubes?
A2: Silicon carbide offers superior high-temperature strength (up to 1700°C), extreme thermal shock resistance (low CTE ~4.5×10⁻⁶/K), and excellent chemical inertness (resisting acids, alkalis, and plasma erosion), ensuring long service life, minimal maintenance, and stable performance in corrosive atmospheres like HCl or metal vapors.
Tags: #SiC Vertical Furnace Tube, #High-Purity, #Customized, #SiC
Ceramics, #High-Temperature Resistant
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