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High Response Precision Linear Voice Coil Motor For Semiconductor Micro Motion Control

Categories	Linear Voice Coil Motor
Brand Name:	SUPT MOTION
Model Number:	VCAB Series
Certification:	ISO9001,CE,3C
Place of Origin:	China,Suzhou
MOQ:	1PCS
Price:	$110-$160
Payment Terms:	T/T
Supply Ability:	To be negotiated
Delivery Time:	1-5pcs ,5 days . >20pcs ,To be negotiated
Packaging Details:	Customized packaging etc.
Warranty:	3months-1year
Product Model:	VCAB0262-0112-00A
Weight(g):	285
Peak Force (N):	262
Total Stroke (mm):	11.2
Max Voltage （V）:	35.1
Application:	Automatic Product
Positioning Accuracy:	High
Product Type:	Linear Voice Coil Motor
Commutation:	Brush
Continuous force(N):	111N
Type:	Compact

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Suzhou Unite Precision Technology Co., Ltd.

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High Response Precision Linear Voice Coil Motor For Semiconductor Micro Motion Control

Product Description:

In semiconductor manufacturing processes such as wafer processing, lithography, inspection, and packaging, micro-positioning control requires extremely high accuracy, fast response, and long-term stability. Linear Voice Coil Motors, featuring direct-drive operation and excellent dynamic performance, have become an ideal actuation solution for micro-displacement control in semiconductor equipment.

Linear Voice Coil Motors generate thrust directly through electromagnetic force, enabling frictionless, backlash-free linear motion with micrometer-level or even nanometer-level positioning resolution. Compared with traditional lead screw or servo-driven mechanisms, Linear voice coil motors offer superior positioning accuracy and repeatability within short stroke ranges. They are particularly well suited for wafer alignment, optical focusing, probe contact control, and precision positioning stages.

In high-speed scanning and dynamic compensation applications, linear voice coil motors deliver high acceleration and high-frequency response, allowing precise tracking of control commands and effective compensation for system errors and environmental disturbances. Their smooth, low-vibration motion helps minimize process disturbances in micro-structure fabrication and ensures stable process performance.

Features:

Sub-micron or nanometer-level displacement resolution
High-speed, high-bandwidth dynamic response
Exceptional repeatability and long-term stability
Zero backlash, low vibration, and particle-free motion
Compatibility with ISO 4–5 cleanroom environments
No lead screws, gears, or backlash
No hysteresis in displacement response
High control bandwidth for closed-loop position, velocity, and force control
Extremely low vibration and acoustic noise

Product Parameters:

Product Model	Peak Force (N)	Continuous Force at 25℃(N)	Total Stroke (mm)	Max Voltage (V)	Back EMF Constant (V/m/s)	Weight of the coil (g)	Stator Diameter	Shaft end thread (mm)
VCAB0005-0039-00A	5	1.5	3	5.4	0.9	23	29.5	M2(Outer)
VCAB0005-0050-00A	5	2.2	3.9	14.5	3.1	27	31.5	M2.5(Outer)
VCAB0013-0072-00A	13	4.2	7.2	26.6	5.72	16.2	26.2	M3(Outer)
VCAB0015-0062-00A	15	6.5	6.2	26.2	9.75	14.8	33	M3(Outer)
VCAB0015-0127-00A	15	4.9	12.7	21.5	4.1	12.5	30.5	Shaft ∮4.8
VCAB0022-0098-00A	22	6.6	9.8	24.7	5.8	20	34.1	M3(Outer)
VCAB0022-0448-00A	22	11.4	44.8	14.3	4	52	48	M3(Inner)
VCAB0032-0050-00A	32	8.9	5	29.3	7.1	48	40	M3(Inner)
VCAB0033-0099-00A	33	8	9.9	24.3	5.87	23.5	36	M3(Outer)
VCAB0033-0224-00A	33	13.5	22.4	26.7	6.8	69	58	M3(Inner)
VCAB0035-0105-00A	35	15.6	10.5	11.9	5	91	50	M3(Inner)
VCAB0044-0040-00A	44	16.3	4	18.3	8.9	46.5	53	M3(Inner)
VCAB0044-0059-00A	44.1	17.7	5.9	14.3	8	43	46	M3(Inner)
VCAB0044-0075-00A	44	13.7	7.5	16.8	7.6	38.6	31.1	M3(Outer)
VCAB0044-0249-00A	44	11.7	24.9	44.9	8.88	65.9	38.1	M3(Inner)
VCAB0070-0149-00A	70	27.3	14.9	26.9	17.7	79	43	M3(Inner)
VCAB0087-0062-00A	87	21.67	6.2	34.5	12.7	45.2	43.1	M3(Inner)
VCAB0087-0563-00A	87	17.5	56.3	63.4	8.1	177	72	shaft ∮10
VCAB0088-0191-00A	88.5	23.2	19.1	29.9	8	162	50.8	M3(Inner)
VCAB0105-0164-00A	105	35.4	16.1	20.1	11.5	150	60.4	M3(Inner)
VCAB0113-0089-00A	113	35	8.9	31	17.5	125	73	shaft ∮8
VCAB0262-0112-00A	262	111	11.2	35.1	41	285	71	shaft ∮10
VCAB0262-0249-00A	262	112	24.9	28.2	26	785	66	shaft ∮8
VCAB0294-0498-00A	294	56.8	49.8	114	24.5	685	93	shaft ∮10
VCAB0436-0187-00A	436	147.6	18.7	40.7	40.7	648	80.4	shaft ∮10
VCAB0436-0250-00A	436	167	25	31.6	37.2	775	78.4	shaft ∮10
VCAB0445-0300-00A	445	185	30	33	35	920	76.2	shaft ∮10

Applications:

Wafer alignment and positioning stages
Lithography focus and height compensation
Probe station Z-axis and contact control
AOI / AVI high-speed scanning actuators
Die bonding and packaging micro-assembly
Precision dispensing and micro-dosing systems

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High Response Precision Linear Voice Coil Motor For Semiconductor Micro Motion Control

High Response Precision Linear Voice Coil Motor For Semiconductor Micro Motion Control

High Response Precision Linear Voice Coil Motor For Semiconductor Micro Motion Control

Product Description:

Features:

Product Parameters:

Applications:

precision linear voice coil motor

semiconductor micro motion motor

high response voice coil actuator

High Response Precision Linear Voice Coil Motor For Semiconductor Micro Motion Control