Silicon Carbide Vertical Furnace Tube Product Overview

The silicon carbide vertical furnace tube is primarily used as an outer tube, ensuring the uniformity of

atmosphere and temperature inside the furnace. In actual operation, the tube must withstand long-term exposure to high temperatures and complex atmospheric conditions, which demand exceptional purity, thermal performance, and structural stability. Our furnace tubes are produced using advanced 3D printing one-piece molding technology, eliminating potential defects caused by traditional welding or assembly. This ensures a more compact and stable structure. Additionally, with the application of CVD silicon carbide coating technology, material purity and corrosion resistance are further enhanced, allowing the tube to maintain long-term stability even under harsh process conditions. The furnace tube operates at temperatures of approximately 1200℃, meeting the stringent requirements of semiconductor and photovoltaic applications.

Silicon Carbide Vertical Furnace Tube Key Features

1. One-piece molding with 3D printing
   The integrated structure avoids seams or stress concentration issues, significantly improving overall strength and reliability.

2. Ultra-low impurity content
   The base material impurity level is less than 300 PPM. After CVD SiC coating, impurity content in the coated region is reduced to below 5 PPM, minimizing contamination and ensuring ultra-clean processing environments.

3. Excellent thermal performance
   With inherently high thermal conductivity, silicon carbide enables rapid heat transfer and uniform temperature distribution, ensuring precise temperature control and consistent product quality.

4. Outstanding thermal shock resistance
   Capable of withstanding frequent rapid heating and cooling cycles at high temperatures without cracking or failure, greatly extending service life and reducing maintenance costs.

5. Superior corrosion resistance and durability
   The CVD coating enhances purity and provides excellent resistance to chemical corrosion, allowing the tube to remain stable across various atmospheres and prolonging overall service cycles.

Silicon Carbide Vertical Furnace Tube Applications

The silicon carbide vertical furnace tube is widely used in:

• Semiconductor manufacturing: For oxidation, diffusion, annealing, and other high-temperature processes requiring strict temperature control and cleanliness.

• Photovoltaic industry: In silicon wafer texturing, diffusion, and passivation processes, ensuring stable processing and consistent quality.

• New materials and thermal treatment: Suitable for experimental setups and industrial equipment requiring high-temperature uniform heating.

Silicon Carbide Vertical Furnace Tube Competitive Advantages

Compared to traditional quartz or alumina tubes, silicon carbide vertical furnace tubes provide significant benefits in temperature resistance, thermal shock stability, and service lifetime. With advanced manufacturing processes and stringent quality control, our product helps customers reduce equipment downtime, improve production stability, and achieve higher efficiency at lower operational costs.

Silicon Carbide Vertical Furnace Tube Specifications