Deposition Magnetron Sputtering Vacuum Coating Machine/Multi-Arc Ion Sputtering Vacuum Chamber

1. Core Working Principle

1. Establishment of Vacuum Environment: A vacuum pump set is used to reduce the pressure inside the coating chamber to a high vacuum state (usually ≤10⁻³Pa), preventing air molecules from interfering with film deposition.

2. Plasma Excitation: An inert gas (such as argon) is introduced into the chamber, and a high-voltage electric field is applied between the target (coating material, e.g., aluminum, titanium, ITO) and the substrate to ionize the argon gas and generate plasma.

3. Magnetron Sputtering Deposition: A magnetic field is used to constrain the electron movement trajectory, enhancing the collision efficiency between electrons and argon molecules. This causes argon ions to bombard the target surface at high speed; the target atoms are "sputtered out", move in a straight line, and deposit on the substrate surface to form a uniform film.

2. Core Advantages

• High Film Quality: The film has good uniformity (deviation can be controlled within ±5%) and strong adhesion to the substrate, making it less likely to peel off or crack.

• High Coating Efficiency: The design of using a magnetic field to constrain electrons significantly improves the sputtering rate. The single-target deposition rate can reach 0.1-10μm/min, suitable for mass production.

• Wide Material Adaptability: The applicable coating materials include metals (aluminum, copper, silver), alloys (stainless steel, titanium alloy), and compounds (ITO, SiO₂, Al₂O₃), meeting different functional requirements.

• Environmental Friendliness and No Pollution: The entire process has no discharge of chemical waste liquid or harmful gases, and only uses inert gases and solid targets, complying with modern industrial environmental protection standards.

3. Main Application Fields

4. Key Technical Parameters (Reference)

• Vacuum Degree: Ultimate vacuum ≤5×10⁻⁵Pa, working vacuum 1×10⁻³ - 5×10⁻¹Pa
• Target Configuration: Single-target, double-target, or multi-target (supporting DC, RF, and mid-frequency sputtering), target size Φ50-300mm
• Substrate Size: Customizable; conventional sizes cover sheet materials (100×100mm - 1000×1000mm) and coiled materials (width ≤1600mm)
• Deposition Rate: 0.5-10μm/min for metal films, 0.1-2μm/min for oxide films
• Substrate Heating Temperature: Room temperature - 500℃ (precise temperature control available, temperature difference ±2℃)

Global Supplier of Next-Generation PVD Vacuum Coating Solutions

Founded in 2003, Lion King is a leading mechanical engineering and technology provider specializing in the R&D, manufacturing, and integration of PVD vacuum coating systems and UV coating solutions. As a trusted partner to clients in over 50 countries, we deliver tailored, high-precision coating technologies that empower industries ranging from decorative finishes to advanced functional applications. Our commitment to innovation, combined with a global after-sales network, ensures reliable and cutting-edge solutions for every project.

Core Expertise: Advanced PVD Vacuum Coating Systems

Our comprehensive product portfolio includes:

1.  Evaporation Vacuum Coating Machines

Ideal for depositing high-purity metals and oxides via thermal or electron beam evaporation, these systems are widely used in optical coatings (e.g., anti-reflective layers on lenses) and decorative applications .

2.  Magnetron Sputtering Vacuum Coating Systems

Leveraging plasma-driven ion bombardment, our sputtering systems produce dense, uniform films on complex 3D substrates. Applications span semiconductor interconnects, hard tool coatings, and architectural glass .

3.  Multi Arc Ion Vacuum Coating Machines

Utilizing high-energy arcs to ionize target materials, these systems deliver ultra-hard, wear-resistant coatings (e.g., TiN for automotive components) with exceptional adhesion .

4.  Optical Electron Gun Vacuum Coating Systems

Engineered for precision deposition in ultra-high vacuum environments, these systems excel in optical thin films (e.g., TiO₂ for laser optics) and semiconductor-grade purity .

5.  Continuous Vacuum Coating Lines

Modular, high-throughput systems integrating sputtering, evaporation, and plasma treatments for large-scale production in photovoltaics, flexible electronics, and packaging .

6.  Roll-to-Roll Vacuum Coating Equipment

Designed for flexible substrates (e.g., metal foils, polymers), these systems enable continuous deposition of EMI shielding films, OLEDs, and battery electrodes with tight tension control .

7.  Specialized Application Lines

A.  Low Emissivity (Low-E) Glass Vacuum Coating Line: Magnetron sputtering-based systems for energy-efficient architectural glass, reducing heat transfer by 90% .

B.  Rearview Mirror Blue Film Vacuum Coating Line: Precision coating solutions for automotive mirrors, offering anti-fog, anti-glare, and hydrophobic properties .

C.  AF/AS Film Magnetron Sputtering Vacuum Coating Line: Advanced systems for anti-fingerprint (AF) and anti-scratch (AS) coatings on consumer electronics and optical devices .

D.  AR Glass vacuum coating line: Specialized for depositing anti-reflective (AR) films on glass substrates, utilizing multi-layer dielectric coatings (e.g., SiO₂/TiO₂ stacks) to reduce surface reflectivity to <1% (from ~4% for uncoated glass). Ideal for displays, optical lenses, architectural glass, and solar panels, enhancing light transmittance and visual clarity. Our AR lines integrate precise thickness control (±0.5nm) and in-line inspection systems to ensure uniformity across large-format glass.

Key Enhancements:

1.  Structural Clarity: Organized products into technical categories (e.g., evaporation, sputtering) and application-specific lines.

2.  Technical Depth: Added industry-specific applications (e.g., Low-E glass for architecture, AF/AS for consumer electronics).

3.  Terminology Consistency: Unified "systems" and "lines" to reflect integrated, scalable solutions.

4.  Flow & Readability: Shortened paragraphs, used bullet points, and highlighted key differentiators (e.g., patents, partnerships).

5.  Market Relevance: Emphasized sustainability and smart manufacturing trends aligned with global industry demands.